Planar processing primer /
George E. Anner.

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Main Author: Anner, George E.
Language(s): English
Published: New York, N.Y. : Van Nostrand Reinhold, c1990.
Subjects: Integrated circuits > Integrated circuits / Very large scale integration > Integrated circuits / Very large scale integration / Design and construction.
Semiconductors > Semiconductors / Design and construction.
Physical Description: xiii, 634 p. : ill. ; 24 cm
ISBN: 0442206577
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Item Link	Original Source
Limited (search only)	University of Michigan
Limited (search only)	University of California

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