Ion implantation :
science and technology /
edited by J.F. Ziegler.

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Related Names: Ziegler, J. F. (James F.)
Language(s): English
Published: Orlando : Academic Press, 1984.
Subjects: Ion implantation.
Physical Description: xi, 635 p. : ill. ; 24 cm
ISBN: 0127806202
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Item Link	Original Source
Limited (search only)	University of Michigan
Limited (search only)	University of California

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