02101cam a2200385 a 4500009214034MiAaHDL20250427000000.0m d cr bn ---auaua870930s1987 waua b 101 0 eng 87060743 0892528109sdr-coo.1034200(COO)Voyager1034200(OCoLC)16537410(NIC)notisAEN1746(CStRLIN)NYCX87B99891NmLaSNmLaSCPaHPIntegrated circuit metrology, inspection, and process control :4-6, March 1987, Santa Clara, California /Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.Bellingham, Wash. :SPIE--the International Society for Optical Engineering,c1987.vi, 329 p. :ill. ;28 cm.Proceedings of SPIE--the International Society for Optical Engineering ;v. 775Includes bibliographical references and index.Mode of access: Internet.Process controlfast(OCoLC)fst01078020http://id.worldcat.org/fast/1078020Measurementfast(OCoLC)fst01715944http://id.worldcat.org/fast/814182Integrated circuitsMeasurementfast(OCoLC)fst00975582http://id.worldcat.org/fast/975577Integrated circuitsInspectionfast(OCoLC)fst00975565http://id.worldcat.org/fast/975565Engineering inspectionfast(OCoLC)fst00910563http://id.worldcat.org/fast/910563Engineering inspectionCongresses.Process controlCongresses.MeasurementCongresses.Integrated circuitsMeasurementCongresses.Integrated circuitsInspectionCongresses.Conference papers and proceedingsfast(OCoLC)fst01423772http://id.worldcat.org/fast/1423772Monahan, Kevin M.http://id.loc.gov/authorities/names/n84016476Society of Photo-Optical Instrumentation Engineers.http://id.loc.gov/authorities/names/n7808893400921403420250425221058.420250427000000.020250427060552.02025-04-27T13:15:19Z2024-06-27T17:30:02ZSDR-COOcooFOLIOprepare.pl-004-009BKsdr-coo.1034200cooSDRCOO1034200coo.31924050858889COO1034200COOCOO20250427googlecoo.319240508588891987icbibUS bib date1 >= 1931