Tools
Integrated circuit metrology, inspection, and process control : 4-6, March 1987, Santa Clara, California / Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
| Other Authors: | Monahan, Kevin M. |
|---|---|
| Language(s): | English |
| Published: |
Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1987. |
| Subjects: |
Integrated circuits
> Inspection
> Congresses.
Integrated circuits > Measurement > Congresses. Mensuration > Congresses. Process control > Congresses. Engineering inspection > Congresses. |
| Note: |
Includes bibliographical references and index. |
| Physical Description: |
vi, 329 p. :
ill. ;
28 cm.
|
| Original Format: |
Book Conference |
| ISBN: |
0892528109 |
| Locate a Print Version: |
Find in a library |
Viewability:
- Limited (search only) (original from Cornell University)