01031nam a22002417a 4500007858009MiAaHDL20100427000000.0m d cr bn ---auaua840531 1983 sw eng d9155414699sdr-nrlf.b120118117GLADN168440Foreign Dissertation 120306(OCoLC)21636013Östling, Mikael.Development of metallization systems for VLSI technology :the use of RBS and other analytical tools.Stockholm :Almqvist & Wiksell International,1983(Uppsala :Arkitektkopia AB)19 p.Acta Universitatis Upsaliensis. Abstracts of Uppsala Dissertations from the Faculty of Science,0345-0058 ;702In Periodical Room.Thesis--Uppsala.Mode of access: Internet.00785800919100210000000.020100427000000.020120815230603.02026-06-04T17:45:06Z2026-06-04T17:30:03ZSDR-NRLFIII - MILLENIUMloader.pl-001-001BKsdr-nrlf.b120118117uc1SDRNRLFuc1.b3524989UC.b120118117UCNRLF20260604googleuc1.b35249891983icbibnon-US bib date1 >= 1931