Catalog Record: Spreading resistance analysis for silicon layers with nonuniform resistivity | Hathi Trust Digital Library

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Spreading resistance analysis for silicon layers with nonuniform resistivity / David H. Dickey and James R. Ehrstein.

Main Author: Dickey, David H.
Other Authors: Ehrstein, James R.
Language(s): English
Published: Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : 1979.
Subjects: Semiconductors > Testing.
Electric resistance, Spreading.
Silicon > Electric properties.
Note: "This activity was supported by the Defense Advanced Research Projects Agency."
"Issued May 1979."
Physical Description: vi, 65 p. : ill. ; 26 cm.
Original Format: Book
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