Catalog Record: Plasma deposited thin films | Hathi Trust Digital Library

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Plasma deposited thin films / editors, J. Mort, F. Jansen.

Other Authors: Mort, J. , Jansen, F. Ph. D.
Language(s): English
Published: Boca Raton, Fla. : CRC Press, c1986.
Subjects: Thin film devices.
Vapor-plating.
Plasma engineering.
Physical Description: 245 p. : ill. ; 27 cm.
Original Format: Book
Original Classification Number: TK7872.T55 P57 1986
ISBN: 0849351197
Locate a Print Version: Find in a library
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