Tools
Integrated circuit metrology, inspection, and process control / sponsored by SPIE--the International Society for Optical Engineering.
| New Title: |
Metrology, inspection, and process control for microlithography |
|---|---|
| Language(s): | English |
| Published: |
Bellingham, Wash., USA : SPIE, c1987-c1995. |
| Subjects: |
Integrated circuits
> Inspection
> Congresses.
Integrated circuits > Measurement > Congresses. |
| Note: |
Papers presented at the 1st-<5th> annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control. |
| Physical Description: |
9 v. :
ill. ;
28 cm.
|
| Original Format: |
Serial All Serials Conference |
| Original Classification Number: | TK 7874 .I542711 |
| Locate a Print Version: |
Find in a library |
Viewability:
- Limited (search only)1993 (original from University of Michigan)
- Limited (search only)1994 (original from University of Michigan)
- Limited (search only)1995 (original from University of Michigan)
- Limited (search only)no.1 1987 (original from University of Michigan)
- Limited (search only)no.2 1988 (original from University of Michigan)
- Limited (search only)no.3 1989 (original from University of Michigan)
- Limited (search only)no.4 1990 (original from University of Michigan)
- Limited (search only)no.5 1991 (original from University of Michigan)
- Limited (search only)no.6 1992 (original from University of Michigan)