02830nas a2200517 a 4500002568507MiAaHDL20250726000000.0m d cr bn ---auaua921012d19871995wauar 1 a0eng d 91660976 sn 910321421060-23641019-2204(MiU)990025685070106381sdr-miu.990025685070106381(MiU)MIU01000000000000002568507-goog(SFX)991042730877730(OCoLC)24815538(MiU)Aleph002568507MYGMYGDLCNSDNSTDLCEYMUtOrBLWlcnsdpTK7874.I54245621.381520Integr. circuit metrol., insp., process controlIntegrated circuit metrology, inspection, and process controlIntegrated circuit metrology, inspection, and process control /sponsored by SPIE--the International Society for Optical Engineering.Bellingham, Wash., USA :SPIE,c1987-c1995.9 v. :ill. ;28 cm.Annualtexttxtrdacontentunmediatednrdamediavolumencrdacarrier[1] (4-6 Mar. 1987)-9 (20-22 Feb. 1995).1989-<1991>: Proceedings / SPIE--the International Society for Optical Engineering1987-1988: Proceedings of SPIE--the International Society for Optical EngineeringVol. for 4-6 Mar. 1987 unnumbered by constitutes 1.Vols. for 1988-<1992> numbered: 2-<6>Mode of access: Internet.Papers presented at the 1st-<5th> annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control.Electronic serial mode of access: World Wide Web.Integrated circuitsMeasurementCongresses.Integrated circuitsInspectionCongresses.Society of Photo-Optical Instrumentation Engineers.http://id.loc.gov/authorities/names/n78088934http://id.loc.gov/rwo/agents/n78088934SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control.http://id.loc.gov/authorities/names/no91027725http://id.loc.gov/rwo/agents/no91027725SPIE digital library.http://id.loc.gov/authorities/names/no2006030688http://id.loc.gov/rwo/agents/no2006030688http://viaf.org/viaf/181712398Integrated circuit metrology, inspection, and process control (Online)Metrology, inspection, and process control for microlithography39015011863407no.1 198700256850720241218071925.020250726000000.020260318140656.02026-03-19T07:01:22Z2024-10-06T17:30:02ZSDR-MIUmiuALMAprepare.pl-004-009SEsdr-miu.990025685070106381MiUSDRMIU002568507mdp.39015011863407MIUno.1 1987990025685070106381MIUMIU20260319googlemdp.39015011863407no.1 19871987icbibUS serial item date >= 1931MIUMIU20260314googlemdp.39015023648093no.2 19881988icbibUS serial item date >= 1931MIUMIU20260228googlemdp.39015013859270no.3 19891989icbibUS serial item date >= 1931MIUMIU20260318googlemdp.39015018524218no.4 19901990icbibUS serial item date >= 1931MIUMIU20260318googlemdp.39015026554496no.5 19911991icbibUS serial item date >= 1931MIUMIU20260318googlemdp.39015012025188no.6 19921992icbibUS serial item date >= 1931MIUMIU20260314googlemdp.3901502654200419931993icbibUS serial item date >= 1931MIUMIU20260305googlemdp.3901502828413419941994icbibUS serial item date >= 1931MIUMIU20260313googlemdp.3901503024616219951995icbibUS serial item date >= 1931